FERROELECTRIC CAPACITOR AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A ferroelectric capacitor and a fabricating method thereof are provided to maintain stably a state of polarization during a long retention period by laminating dielectric layers in case of different composition or laminating heterogeneous dielectric layers having different composition ratios in case of the same composition. CONSTITUTION: A ferroelectric capacitor includes a lamination structure of a bottom electrode(40), a dielectric layer(42), and a top electrode(44). The dielectric layer is formed by laminating sequentially a plurality of double-layered ferroelectric layers. Two adjacent double-layered ferroelectric layers of the double-layered ferroelectric layers are heterogeneous in a composition or in a composition ratio. An intermediate layer is formed between the bottom electrode and the dielectric layer or between the top electrode and the dielectric layer.