| 摘要 |
PURPOSE: To obtain a silica aerosol useful for filter tests having high safety without affecting characteristics of semiconductor products and sticking a compound such as sodium to an air filter by dispersing silica particles produced in the vapor phase in air. CONSTITUTION: This silica aerosol for filter tests is obtained by dispersing anhydrous silica prepared by burning and thermally decomposing silicon tetrachloride in the vapor phase in air. The silica aerosol is prepared by directly dispersing the anhydrous silica particles produced in the vapor phase in air or dispersing the anhydrous silica particles produced in the vapor phase at 2-20wt.% concentration in pure water, spraying and drying the resultant dispersion of the silica particles in air.
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