PIEZOELECTRIC MATERIAL LAMINATED STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric material laminated structure which has improved piezoelectric properties and realizes not only machining but also photolithographic micromachining.

SOLUTION: A structure in which piezoelectric materials 3 are positioned on both sides of an intermediate layer 4 so that their polarizing directions are opposite is formed as a basic unit. One or more basic units are laminated. As the polarizing directions of the piezoelectric materials 3 are alternately reversed, the piezoelectric materials between which the intermediate layer 4 are placed are displaced in opposite directions, resulting in improved displacement and force.

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