| 摘要 |
PURPOSE: To provide a process and apparatus for delivering an ultra high purity fluid comprising at least one component to a point of use at a required pressure without pumping. CONSTITUTION: The apparatus comprises an inlet pipe(42) for introducing a feed stream comprising at least one component wherein the feed stream is at a first pressure; an expansion nozzle(44) that is in fluid communication with the inlet pipe wherein the pressure of the feed stream is reduced to a second pressure below the first pressure to convert at least a portion of the feed stream to provide the solid phase source and an effluent vapor; a vessel(40) that is in fluid communication with the expansion nozzle having at least one selected from the solid phase source, the feed stream, the slush, a fluid product, the effluent vapor, and mixtures thereof contained therein; at least one energy source proximal to and/or contained within the vessel wherein the at least one energy source converts at least a portion of the solid phase source to produce the slush; an outlet pipe(46) in fluid communication with the vessel for the removal of at least a portion of the effluent vapor while maintaining a controlled pressure within the vessel; and a pressure control valve(48) in fluid communication with the outlet pipe.
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