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发明名称
Stickstoffdotierte einkristalline Siliziumscheibe mit geringen Fehlstellen und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE69915729(T2)
申请公布日期
2004.08.05
申请号
DE1999615729T
申请日期
1999.05.26
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
IIDA, MAKOTO;TAMATSUKA, MASARO;KIMURA, MASANORI;MURAOKA, SHOZO
分类号
C30B15/02;C30B15/00;(IPC1-7):C30B15/00;C30B29/06
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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