发明名称 MEMS enclosure
摘要 A low-cost, high-performance, reliable micromirror package (300) that replaces the ceramic substrate in conventional packages with a printed circuit board substrate (30) and a molded plastic case (33), and the cover glass with a window (36), preferably an optically clear plastic window. The printed circuit board substrate (30) allows for either external bond pads or flex cable connection of the micromirror package to the projector's motherboard. These packages support flexible snap-in, screw-in, ultrasonic plastic welding, or adhesive welding processes to overcome the high cost seam welding process of many conventional packages.
申请公布号 US2004150058(A1) 申请公布日期 2004.08.05
申请号 US20040763291 申请日期 2004.01.23
申请人 LIU JWEI WIEN 发明人 LIU JWEI WIEN
分类号 B81B7/00;G02B26/08;(IPC1-7):H01L27/14 主分类号 B81B7/00
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