| 摘要 |
PROBLEM TO BE SOLVED: To quickly measure an object, having level differences in contour part. SOLUTION: An image processor 23 measures the coordinates of a measurement point No. n of an object 4 to be measured, by using the first partial image positioning at the light axis center of an optical system among the photographed images of the object 4. By using the second partial image included in the photographed images of the object 4, the coordinates of the next measuring point No. n+1 of the object 4 is tentatively measured. A horizontal direction driver 24 moves a stage 11 so that the optical axis center of an optical system comes to the tentatively measured coordinate values. Also, the vertical direction driver 22 controls the focus of the optical system so that the focus is on the object, positioned at the optical axis center of the optical system, based on the signal from an elevation sensor 121. COPYRIGHT: (C)2004,JPO&NCIPI
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