| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive silicon semiconductor pressure measuring instrument of enhanced pressure-resistance capable of preventing hysteresis. SOLUTION: This semiconductor pressure measuring instrument provided with a recess provided in one face of a silicon sensor chip and for forming a diaphragm, and a pressure vessel joined to the one face of the silicon sensor chip or joined via a support substrate, and comprising metal, is provided with a silicon oxide layer formed to connect its one face to one face of the pressure vessel, and a silicon layer formed to connect its one face to the other face of the silicon oxide layer, and the silicon sensor chip with its one face joined directly to the other face of the silicon layer, or joined via the silicon support substrate comprising silicon of which the one face is directly joined to the other face of the silicon layer. COPYRIGHT: (C)2004,JPO&NCIPI
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