发明名称 |
Manufacture of corpuscular radiation systems, e.g. electron beam or ion beam systems, producing corpuscular radiation systems on substrates using corpuscular radiation induced deposition |
摘要 |
A method for producing corpuscular radiation systems (10-10, 12-12) in which a first corpuscular radiation system is formed on a first substrate (14) using corpuscular radiation induced deposition. The first corpuscular radiation system is then used to produce at least a second corpuscular radiation system on a second substrate (16) using computer controlled corpuscular radiation induced deposition using the first corpuscular radiation system. An Independent claim is made for a device for manufacture of corpuscular radiation systems.
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申请公布号 |
DE10302794(A1) |
申请公布日期 |
2004.07.29 |
申请号 |
DE20031002794 |
申请日期 |
2003.01.24 |
申请人 |
NAWOTEC GMBH |
发明人 |
KOOPS, HANS WILFRIED PETER |
分类号 |
H01J9/02;H01J37/317;(IPC1-7):H01J37/02;B81B7/00;G03B42/00;H01J27/20 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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