| 摘要 |
A method and an apparatus for obtaining irradiation intensity of a laser beam, and a laser beam irradiation apparatus that enable obtaining an irradiation intensity distribution of a laser beam easily, and attaining more accurate ablation. The method for obtaining an irradiation intensity of a laser beam has the steps of inputting an intensity of fluorescence emitted from a fluorescent glass, the fluorescence intensity being obtained when the laser beam is irradiated onto the fluorescent glass which emits the fluorescence by irradiation of the laser beam with an ablation area of a size required for processing an object to be processed, and obtaining an irradiation intensity distribution of the laser beam in the ablation area based on the inputted fluorescence intensity.
|
