Interferometer for surface profiling of objects has an adaptive optical element to permit depth scanning of an object without the object having to be displaced relative to an imaging device

摘要

Interferometer measurement device for measuring the shape of an object using coherent electromagnetic radiation has at least an adaptive optical element (AOE) with the help of which the object (O) is imaged on an imaging element (BA) and or the wavefront of the reference beam and or the optical path length in the reference light path (RL) and or the object light path (OL) can be influenced.