| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aromatic ester derivative giving a radiation-sensitive resin composition having excellent resolution and focal depth latitude for especially a KrF excimer laser and provide a radiation-sensitive resin compound compounded with the aromatic ester derivative. <P>SOLUTION: The aromatic ester derivative is expressed by formula (1), formula (2) or formula (3) (R<SP>1</SP>to R<SP>8</SP>are each H or an alkyl; X is a single bond; and a<SB>1</SB>to a<SB>8</SB>are each an integer satisfying the relationships of 0≤a<SB>1</SB>+a<SB>3</SB>≤5, 0≤a<SB>2</SB>+a<SB>4</SB>≤5, 1≤a<SB>1</SB>+a<SB>2</SB>≤10, 1≤a<SB>5</SB>+a<SB>6</SB>≤8 and 1≤a<SB>7</SB>+a<SB>8</SB>≤6). <P>COPYRIGHT: (C)2004,JPO&NCIPI |
