| 摘要 |
A multi-gas sensor device (10) for the detection of dissolved hydrocarbon gases in oil-filled electrical equipment comprises a semiconductor substrate (12, 14) one or more catalytic metal gate-electrodes (16) deposited on the surface of the semiconductor substrate operable for sensing various gases, and an ohmic contact (22) deposited on the surface of the substrate. The semiconductor substrate comprises one of GaN, SiC, AlN, InN, AlGaN, InGaN and AlInGaN. A method for sensing gas in an oil-filled reservoir of electrical equipment, comprises providing a sensor device (10) immersed in the oil-filled reservoir, allowing the gases emitted from the oil to interact with the one or more catalytic metal gate-electrodes (16), altering the gas as it contacts the catalytic metal gate-electrodes (16) and altering the sensitivity of the sensor. The device (10) may have a passivation layer for increasing the selectivity to different gases and a heating element. |
