发明名称 Semiconductor device using a polysilicon layer
摘要 A semiconductor device in which polysilicon is used to form source and drain regions in an initial process step so as to reduce resistance of bit lines and minimize a junction capacitance and thus improve its reliability, and a method for fabricating the same are disclosed, the semiconductor device including a semiconductor substrate, trenches formed in predetermined areas of the semiconductor substrate, an insulating layer formed in the trenches and beneath a surface of the substrate to have a recess, a polysilicon layer formed on the insulating layer in the trench, source and drain regions formed at both sides of the polysilicon layer beneath a surface of the semiconductor substrate, and gates formed over the semiconductor substrate.
申请公布号 US6768159(B2) 申请公布日期 2004.07.27
申请号 US20020284333 申请日期 2002.10.31
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 PARK EUN JEONG;LEE SUNG CHUL
分类号 H01L21/74;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/788 主分类号 H01L21/74
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