| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid injection head, which can suppress fluctuations in the displacement of a piezoelectric element and a diaphragm, and can bring about stable ink ejection characteristics. <P>SOLUTION: The liquid injection head is equipped with a passage forming substrate wherein a pressure generating chamber communicating with a nozzle opening for emitting a jet of liquid is formed, and the piezoelectric element which is composed of a lower electrode, a piezoelectric material layer and an upper electrode, provided on the side of one surface of the passage forming substrate via the diaphragm. The manufacturing method for the liquid injection head is provided with an aging process wherein a driving signal with a voltage and a frequency higher than in actual use, is applied to the piezoelectric element by a prescribed number of pulses, and wherein the piezoelectric element is driven by generating an electric field intensity, higher than in the actual use, in the piezoelectric material layer, after a process wherein the pressure generating chamber is formed. Thus, the fluctuation of the displacement of the piezoelectric element and the diaphragm in the actual use is suppressed. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
