发明名称 |
METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER |
摘要 |
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller. |
申请公布号 |
WO2004010234(A3) |
申请公布日期 |
2004.07.22 |
申请号 |
WO2003US22435 |
申请日期 |
2003.07.17 |
申请人 |
CELERITY GROUP, INC. |
发明人 |
LULL, JOHN, MICHAEL;WANG, CHIUN;SAGGIO, JOSEPH, A., JR. |
分类号 |
G05B13/04;G05D7/06 |
主分类号 |
G05B13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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