发明名称 CONVEYING RAIL
摘要 PROBLEM TO BE SOLVED: To provide a conveying rail which can suppress the oxidation of a lead frame to be conveyed, while enabling quenching of the lead frame the chip of which is bonded. SOLUTION: A convey path 12 for transferring the lead frame is provided in a recess shape, in a rail body 11 made of metals, and its upper part is covered with a cover 21. The rail body 11 is divided into an upstream-side constituent member 42 and a downstream-side constituent member 43 at a division location 41 set to a downstream side of a linked point 36. Both the constituent members 42, 43 are separated by a distance from each other and are connected to each other via a connection member 46, and an intermediate member 56 made of ceramics is inserted into this gap 55 detachably. Cartridge heaters 81 are provided at the bottom section of both the constituent members 42, 43 and the energization conditions for each of the cartridge heaters 81 can be controlled individually. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004200524(A) 申请公布日期 2004.07.15
申请号 JP20020369102 申请日期 2002.12.20
申请人 NIDEC TOSOK CORP 发明人 SAITO MITSUO;YUKIMORI YOSHIAKI
分类号 H01L21/50;(IPC1-7):H01L21/50 主分类号 H01L21/50
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