发明名称 SEMICONDUCTOR DEVICE TESTER
摘要 In a semiconductor device testing apparatus for testing a plurality of semiconductor devices at one time, data peculiar to each semiconductor device can be written therein simultaneously with the avoidance of excessive enlargement in the scale of circuitry. A pair of an integer delay generation part and a fraction delay data generation part that are components of the semiconductor device testing apparatus is provided by the same number as that of pins of each semiconductor device under test, and a waveform control part is provided by the same number as that of the semiconductor devices under test for each of the pairs. In each waveform control part are generated a set pulse and a reset pulse for generating a test pattern signal to be applied to each of pins having the same attribute of the semiconductor devices under test, thereby to generate a test pattern signal. By applying individual data to each waveform control part instead of test pattern data, respective individual data can be written simultaneously in the semiconductor devices under test.
申请公布号 KR20040063924(A) 申请公布日期 2004.07.14
申请号 KR20047006916 申请日期 2002.11.08
申请人 发明人
分类号 G01R31/26;G01R31/3183;G01R31/319;H01L21/66 主分类号 G01R31/26
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