WASHING METHOD FOR ORGANIC EL DEVICE MANUFACTURING APPARATUS, AND MANUFACTURING METHOD OF ORGANIC EL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for stably manufacturing a high quality organic EL device by evenly forming an organic layer on a surface of an electron hole injection electrode of a substrate formed with the electrode on a surface. SOLUTION: An interior of a conveyance chamber is washed by ozone gas by utilizing time for replacing a deposition source to a new deposition source set in an interior of an organic film forming chamber of the organic EL device manufacturing apparatus provided at least with the organic film forming chamber for forming the organic layer on the surface of the electron hole injection electrode of the substrate formed with the electrode on the surface, and the conveyance chamber arranged in an interior of a robot for conveying the electron hole injection electrode formed substrate to the organic film forming chamber. COPYRIGHT: (C)2004,JPO&NCIPI