| 摘要 |
PROBLEM TO BE SOLVED: To accurately and speedily align a probe for film thickness measurement. SOLUTION: In this holder 100 for alignment, a light through hole 101b is formed at a center part for an upper part 101, the lower surface of the light through hole 101b is provided with a reflecting plate 103, a recession part 102c freely mountable to a rotating shaft of a chuck is formed in a lower part 102. Alignment is performed by the holder 100 for alignment. The holder 100 for alignment is mounted to the rotating shaft instead of the chuck, and LED light from the probe for film thickness measurement is made incident onto the holder 100 for alignment. The probe for film thickness measurement receives reflected light reflected at the reflecting plate 103. The holder 100 for alignment is moved to a location at which the reflected light to be received by the probe for film thickness measurement is the most intense. By this way, the location of the probe for film thickness measurement is aligned to the center location of the chuck. COPYRIGHT: (C)2004,JPO&NCIPI
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