| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal heater of which flatness of the heating face is secured, superior in uniformity of temperature on the heating face, heating the object to be heated such as a semiconductor wafer with small temperature fluctuation at heating. SOLUTION: The metal heater is composed of a metal plate and a heating element, and the metal plate is composed of a plurality of pieces, and the heating element is interposed between the metal plates, and the thickness of the metal plate on the heating face side is equal to or thicker than the thickness of the metal plate on the other side of the heating face. COPYRIGHT: (C)2004,JPO&NCIPI
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