| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection property of a present photodetector having a transformation layer so as to achieve the higher yield and restrain the generation of any ghost. SOLUTION: A lithography projector is provided with a radiation system for supplying a projection beam of primary radiation, a supporting structure for supporting a patterning means which acts to patternize a projection beam according to the required pattern, a substrate table for holding a substrate, a projection system for projecting the patternized beam on the target part of the substrate, and a radiation sensor which can move in a path in which the projection beam traverses, to accept the primary radiation from the projection beam. The sensor is provided with a radiation sensitive material which converts the incident primary radiation into the secondary radiation, a sensing means which can detect the secondary radiation from the radiation sensitive material, and a filter material for substantially blocking the secondary radiation from propagating in the direction that the secondary radiation gets away from the sensing means. COPYRIGHT: (C)2004,JPO&NCIPI
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