| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystalline semiconductor film which has high performance as compared with a conventional product, a method for manufacturing the crystalline semiconductor film, a semiconductor device using the semiconductor film, and a display device using the semiconductor device. SOLUTION: The crystalline semiconductor film contains a plurality of crystal grains, and crystal grains of which the <001> azimuth is≤±10°from a prescribed direction regulated in a film surface out of the plurality of crystal grains occupy≥70% of the whole crystal grains as an area. COPYRIGHT: (C)2004,JPO&NCIPI
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