发明名称 Fluorinated polymers
摘要 Provided are polymers derived from bridged heterocyclic compounds, fluorinated norbornene compounds, fluorinated alkenes, heterocyclic compounds, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the monomer compounds for use in the present polymers.
申请公布号 US2004126695(A1) 申请公布日期 2004.07.01
申请号 US20030431058 申请日期 2003.05.07
申请人 HONEYWELL INTERNATIONAL, INC. 发明人 POSS ANDREW J.;NAIR HARIDASAN K.;NALEWAJEK DAVID;VAN DER PUY MICHAEL
分类号 C07C17/16;C07C17/30;C07C22/02;C07C33/44;C07C67/343;C07C67/347;C07D487/08;C07D493/08;C08F8/18;G03F7/004;G03F7/039;(IPC1-7):G03F7/004;G03C5/00;G03C1/492 主分类号 C07C17/16
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