FIELD EMISSION DEVICE, METHOD OF MANUFACTURING SUCH A DEVICE, AND DISPLAY DEVICE COMPRISING A FIELD EMISSION DEVICE

摘要

A field emission device (100) comprises a cathode electrode (120) and a gate electrode (140). Between the electrodes, a dielectric layer (130) is provided which is generally patterned. According to the invention, the dielectric layer (130) comprises a siloxane matrix and/or a silicon oxide matrix, which are formed from a precursor layer of a sol-gel material of an organosilane compound and/or an organosilicate compound respectively. Such a dielectric layer has advantageous electric, mechanical and chemical properties and is particular useful for use in a Field Emission Display (FED) due to its ability to withstand high temperatures.