发明名称 POLYCRYSTALLINE FERROELECTRIC CAPACITOR HETEROSTRUCTURE EMPLOYING HYBRID ELECTRODES
摘要 FERROELECTRIC CAPACITOR HETEROSTRUCTURES EXHIBITING EXCEPTIONAL RELIABILITY AND RESISTANCE TO FATIGUE AND IMPRINTING COMPRISES HYBRID ELECTRODES OF HIGHLY CONDUCTIVE PLATINUM WITH POLYCRYSTALLINE METALLIC OXIDE AND FERROELECTRIC MATERIALS DEPOSITED ON SI-CMOS-COMPATIBLE SUBSTRATES WITHOUT THE REQUIREMENT FOR INTERPOSED CRYSTALLOGRAPHIC ORIENTATION TEMPLATES.
申请公布号 MY117284(A) 申请公布日期 2004.06.30
申请号 MYPI9503518 申请日期 1995.11.18
申请人 TELCORDIA TECHNOLOGIES, INC. 发明人 RAMAMOORTHY RAMESH
分类号 H01L21/8247;H01L29/76;H01L21/02;H01L21/822;H01L21/8242;H01L27/04;H01L27/10;H01L27/108;H01L29/788;H01L29/792;H01L31/062 主分类号 H01L21/8247
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