发明名称 |
METHOD FOR FORMING FUSE BOX OF SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A method for forming a fuse box of a semiconductor device is provided to be capable of restraining the fuse box from being over-etched and simplifying the manufacturing processes of the fuse box. CONSTITUTION: A fuse box(12) and a pad(13) are formed on a semiconductor substrate(11). At this time, the fuse box is spaced apart from the pad. A passivation layer(14) is thickly formed on the entire surface of the resultant structure for completely enclosing the fuse box and the pad. A photoresist layer is formed on the passivation layer. A photoresist pattern is formed by selectively patterning the photoresist layer using an exposure mask. The passivation layer is selectively etched for exposing the pad by using the photoresist pattern as an etching mask.
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申请公布号 |
KR20040054098(A) |
申请公布日期 |
2004.06.25 |
申请号 |
KR20020080764 |
申请日期 |
2002.12.17 |
申请人 |
ANAM SEMICONDUCTOR., LTD. |
发明人 |
KIM, JAE YEONG |
分类号 |
H01L27/02;(IPC1-7):H01L27/02 |
主分类号 |
H01L27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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