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发明名称
QUALITATSÜBERWACHUNG BEI EINER FERTIGUNG
摘要
申请公布号
DE50006488(D1)
申请公布日期
2004.06.24
申请号
DE20005006488
申请日期
2000.01.17
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;X-FAB SEMICONDUCTOR FOUNDRIES AG
发明人
OECHSNER, RICHARD;TSCHAFTARY, THOMAS;STRZYZEWSKI, PIOTR;PFITZNER, LOTHAR;SCHNEIDER, CLAUS;HENNIG, PETER
分类号
G05B19/418;(IPC1-7):G05B19/418
主分类号
G05B19/418
代理机构
代理人
主权项
地址
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