发明名称 |
Device and method for scanning probe microscope |
摘要 |
The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path. |
申请公布号 |
EP1430485(A2) |
申请公布日期 |
2004.06.23 |
申请号 |
EP20020776745 |
申请日期 |
2002.09.24 |
申请人 |
JPK INSTRUMENTS AG |
发明人 |
KNEBEL, DR. DETLEF;JAEHNKE, TORSTEN;SUENWOLDT, OLAF |
分类号 |
G01B21/00;G01B21/30;G01Q20/02;G01Q60/06;(IPC1-7):G12B21/08;G12B21/22 |
主分类号 |
G01B21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|