Capacitive load driving unit and method and apparatus for inspecting the same

摘要

A capacitive load driving unit includes a plurality of capacitive loads, a drive circuit for charging and discharging the capacitive loads, a pair of power lines for supplying a drive voltage from an external power source to the drive circuit, and a current reserve circuit for reserving a current required by the drive circuit for charging the capacitive loads. The current reserve circuit includes a capacitor that is charged by the drive voltage from the power lines, and a coupler section for coupling the capacitor between the power lines except for when a defect inspection is conducted.