Spatial light modulator

摘要

A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into at least two individual wing portions. The wind portions extend laterally from the support and are capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of incident light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.