Film forming apparatus and method of driving same, device manufacturing method, device manufacturing apparatus, and device

摘要

A film forming apparatus and a method of driving this apparratus control vibrations imparted to a liquid by a discharge waveform (a first signal) that causes liquid drops to be discharged and by a micro vibration waveform (a second signal) that does not cause liquid drops to be discharged and that also imparts a shear rate to the liquid that lowers the viscosity of the liquid.