Piezoelectrically actuated liquid metal switch

摘要

In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a plurality of shear mode piezoelectric elements used to cause a pressure differential in a pair of fluid chambers. Differential pressure is created in the chambers by contracting and expanding the chambers due to action by the piezoelectric elements. The differential pressure causes the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.