| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting quantitatively by an optical technique a fine irregularity defect on the surface of a rubber blade which is a functional part of a copying machine or a laser beam printer, or the like. SOLUTION: A shielding plate for shielding a part of an aperture of a light receiving part is provided in an oblique incident regular reflection optical system, to thereby acquire a system functioning as two systems, namely, a system for grasping the fine irregularity defect on the work surface by the reflected light quantity, and a system for detecting a refuge, a dirt, a flaw or the like causing a reflectivity light distribution characteristic change on the surface by providing a moving mechanism on the shielding plate and by removing the shielding plate from an optical path. Hereby, when realizing as a device, miniaturization and shortening of an inspection time are enabled. COPYRIGHT: (C)2004,JPO
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