发明名称 METHOD AND DEVICE FOR JOINING
摘要 <p>In a method and device for joining objects to be joined having joints on the surfaces of base materials, the objects are once locked in a state where at least either of the objects to be joined is being pressed to the other for copying. After that, the objects to be joined are separated and the relative positions of the objects are aligned to a predetermined accuracy. Then, both objects to be joined are again brought into contact with each other and joined by at least heating, pressing, or by applying an ultrasonic wave. Because the objects to be joined are once locked after the parallelism between both objects is matched by copying operation, separated for the alignment and joined, a predetermined alignment can be performed using the advantage of parallelism adjustment by the copying operation. This provides excellent joining with high accuracy, which can be easily performed.</p>
申请公布号 WO2004049427(A1) 申请公布日期 2004.06.10
申请号 WO2003JP15178 申请日期 2003.11.27
申请人 TORAY ENGINEERING CO., LTD.;YAMAUCHI, AKIRA 发明人 YAMAUCHI, AKIRA
分类号 H01L21/60;(IPC1-7):H01L21/60;C04B37/00;H01L21/02;H01L21/52;H05K3/26 主分类号 H01L21/60
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