SILICON CARBIDE NANOROD AND ITS PRODUCTION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a mass-production process for inexpensively and efficiently producing an SiC nanorod which is useful as a reinforcement for a structural material or as a semiconductor or an optical element.

SOLUTION: The silicon carbide nanorod with a length of 10-100 μm and a diameter of 20-100 nm is a fibrous structure made of cubic silicon carbide. The nanorod is obtained by introducing silicon suboxide and amorphous activated carbon into a crucible and heating them in an inert gas atmosphere until the silicon suboxide vaporizes.

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