发明名称 TERAHERTZ PULSED LIGHT MEASURING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To improve S/N of a current signal from an optical switch element, and to thereby improve measurement accuracy, in a terahertz pulsed light measuring device. <P>SOLUTION: The optical switch element 6a is disposed on an upper part of a casing 6b of a terahertz pulsed light detector 6 constituting this terahertz pulsed light measuring device, and a current/voltage converter 13 is disposed and formed integrally on the periphery thereof. Hereby, the wiring distance between the optical switch element 6a and the current/voltage converter 13 is shortened, and an influence of a noise to the current signal S<SB>I</SB>outputted from the optical switch element 6a and attenuation of the current signal S<SB>I</SB>are prevented, to thereby perform measurement having excellent S/N, and to improve accuracy. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004163280(A) 申请公布日期 2004.06.10
申请号 JP20020329952 申请日期 2002.11.13
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 GONDA TSUNEMI;KUROO SHINICHI
分类号 G01N21/35;G01N21/3563;G01N21/3586;(IPC1-7):G01N21/35 主分类号 G01N21/35
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