POLISHING PADS WITH POLYMER FILLED FIBROUS WEB, AND METHODS FOR FABRICATING AND USING SAME
摘要
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
申请公布号
EP1341643(A4)
申请公布日期
2004.06.09
申请号
EP20010274075
申请日期
2001.11.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;FREUDENBERG NONWOVENS, L.P.
发明人
CHEN, SHYNG-TSONG;RODBELL, KENNETH P.;HSU, OSCAR KAI CHI.;VANGSNESS, JEAN;GILBRIDE, DAVID S.;BILLINGS, SCOTT CLAYTON;DAVIS, KENNETH.