LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURED BY THE SAME WHICH HAVE HIGHER THROUGH-PUT USING THE LITHOGRAPHIC PROJECTION APPARATUS

摘要

PURPOSE: Provided are a lithographic projection apparatus and a small device with dimension of micrometers or less such as "bio-chips" and having higher through-put using the lithographic projection apparatus. CONSTITUTION: The lithographic projection apparatus comprises a radiation system for introducing radiation projection beam; a patterning means for the projection beam depending on desired patterns; a mask table for fixing a substrate(W); a projection system for projecting the patterned beam on a targeting part of the substrate; and a fluid treatment cell mounted on the substrate and communicating surface thereof. The fluid treatment cell(FC) is for contacting the fluid and the targeting part to derive inter-reaction between them. The cell further includes a plurality of individual chambers mounted on the mask table and communicating respective areas of the substrate.