发明名称 Mixture of di-, tri- and other oligomeric phenazinium compounds, used in copper electroplating bath for decorative plating or plating circuit board or semiconductor substrate, is prepared from monomer by diazotization and boiling
摘要 Mixture of oligomeric phenazinium compounds contains phenazinium compound(s) selected from compounds (I) with 2 monomer units (A), which are linked through positions 1-4 or 5-8 and optionally have different substituents, compounds (II) with 3 monomer units of this type and other oligomeric phenazinium compounds, with a total of not less than 80 mole-% (I) and (II). Mixture of oligomeric phenazinium compounds contains phenazinium compound(s) selected from compounds (I) with 2 monomer units of formula (A), optionally with different substituents, compounds (II) with 3 monomer units of this type and other oligomeric phenazinium compounds, with a total of not less than 80 mole-% (I) and (II): N(R5)CC(R4)C(R3) = a group of formula (IIIa) or (IIIb); R1-9 = H, halogen, amino, OH, CN, SCN, SH, COOH, COO-salt, COO-ester, SO3H, SO3-salt, SO3-ester or lower alkyl(hetero)aryl; or R1-4, R6-9 = a single bond connecting individual monomer units; or R2, R3 may = oxo, imino or methylene if (A) contains a (IIIb) unit; NCC(R1)C(R2) = a group of formula (IVa) or (IVb); A- = an acid anion Independent claims are also included for the following: (1) preparation of the mixture; (2) acid copper electroplating bath containing the mixture.
申请公布号 DE10261852(B3) 申请公布日期 2004.06.03
申请号 DE20021061852 申请日期 2002.12.20
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 BRUNNER, HEIKO;DAHMS, WOLFGANG;MORITZ, THOMAS;GRIESER, UDO;OEZKOEK, AKIF
分类号 C25D3/38;C25D7/12;H01L21/288;H05K3/42;(IPC1-7):C07D241/46 主分类号 C25D3/38
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