发明名称 GROUP III NITRIDE-BASED COMPOUND SEMICONDUCTOR LIGHT EMITTING ELEMENT AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide alight emitting element from which the light emitted from a group III nitride-based compound semiconductor layer can be emitted easily to the outside and in which a highly crystalline group III nitride-based compound semiconductor layer can be grown stably on the whole surface of a wafer. <P>SOLUTION: After recessed and projecting sections are provided on the surface of a sapphire substrate, the surface of the substrate is flattened by filling up the recessed sections with a filler. The filler has a refractive index which is substantially equal to that of the group III nitride-based compound semiconductor or closer to that of the semiconductor than that of the light-transmissive substrate. Then the group III nitride-based compound semiconductor layer is formed on the treated surface of the substrate. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004153090(A) 申请公布日期 2004.05.27
申请号 JP20020317746 申请日期 2002.10.31
申请人 TOYODA GOSEI CO LTD 发明人 KAMIMURA TOSHIYA
分类号 H01L33/12;H01L33/22;H01L33/32;H01L33/56;H01L33/60;H01L33/62 主分类号 H01L33/12
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