| 摘要 |
PROBLEM TO BE SOLVED: To provide a nominal prongs inspection device of a multilayer substrate which can improve instrumentation precision of a pitch between nominal prongses, as compared with the conventional inspection method. SOLUTION: The center position of the nominal prongs is presumed with a high precision and instrumentation precision of the pitch can be improved, when the form of a nominal prongs is not a perfect circle, by installing an image processing means 4a and an operation means 4b. The image processing means 4a obtains position information in the x, y directions along a horizontal plane of an xyz table 1 which mounts the multilayer substrate and can move in the x, y, z directions, and presumes a center coordinates position of the nominal prongs from its contour by using image data wherein each of the nominal prongs is magnified and imaged, The operation means 4b computes the pitch between the nominal prongses from the presumed result of the center coordinate position of each of the nominal prongses. COPYRIGHT: (C)2004,JPO
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