发明名称 SOLID STATE IMAGING DEVICE HAVING CHANNEL STOPPER, AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A solid state imaging device and a manufacturing method thereof are provided to improve image quality by forming a channel stopper used for preventing a color mixing phenomenon. CONSTITUTION: A solid state imaging device includes a photo sensor formed on a substrate(100) and a channel stopper(70) formed on a sidewall of the photosensor on the substrate. The channel stopper includes a plurality of multiple layers(70A,70B,70C,70D) in a depth direction of the substrate. The regions of the multiple layers of the channel stopper are multiple layers in a direction perpendicular to the depth direction of the substrate. The regions of the multiple layers of the channel stopper are configured to decrease in a direction perpendicular to the depth direction of the substrate.
申请公布号 KR20040042904(A) 申请公布日期 2004.05.20
申请号 KR20030080735 申请日期 2003.11.14
申请人 SONY CORPORATION 发明人 HIRATA KIYOSHI
分类号 H01L27/148;H01L27/146;H01L29/768 主分类号 H01L27/148
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