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发明名称
Surface cleanliness measurement procedure and tools for measuring surface cleanliness
摘要
申请公布号
EP1191323(A3)
申请公布日期
2004.05.19
申请号
EP20010304616
申请日期
2001.05.24
申请人
GENERAL ELECTRIC COMPANY
发明人
SCHRODER, MARK STEWART;WOODMANSEE, DONALD ERNEST;BEADIE, DOUGLAS FRANK
分类号
G01N1/04;B08B1/00;G01N1/02;G01N21/47;G01N21/94;(IPC1-7):G01N1/02
主分类号
G01N1/04
代理机构
代理人
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