发明名称 Method, apparatus, data carrier and computer program module for monitoring a production process
摘要 <p>Computer-based method for monitoring a manufacturing process for a multiplicity of physical objects in which a number of rules are stored that relate to the status of at least one of a number of physical objects. The rules are used to select a random sample of the physical objects and the sample objects marked so that they are subjected to a measurement process. The rules are designed to reduce the number of measurements and avoid redundant measurements, whereby the rules can be combined and tested against each other. The invention also relates to a corresponding device, computer program element and computer readable storage medium.</p>
申请公布号 EP1420310(A2) 申请公布日期 2004.05.19
申请号 EP20030025800 申请日期 2003.11.11
申请人 INFINEON TECHNOLOGIES AG 发明人 MAERITZ, JOERN;STEINKIRCHNER, ERWIN
分类号 G05B19/418;G05B23/02;H01L21/66;(IPC1-7):G05B19/418 主分类号 G05B19/418
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