| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is capable of transferring heat to a work with high conductivity and making the distribution of heat uniform through the work. SOLUTION: The electrostatic chuck A is equipped with an electrostatic chuck sheet 1 that attracts and holds the work electrostatically. A heat transfer sheet 20, which is composed of a fluororubber material and a high-conductivity filler mixed into the fluororubber material, is arranged on the electrostatic chuck sheet 1. COPYRIGHT: (C)2004,JPO |
