发明名称 Apparatus and method for plating solution analysis
摘要 A method and apparatus for analyzing plating solutions. The apparatus generally includes a plating cell, a reference electrolyte input, one or more external additive pumps, and a process controller. In one embodiment, the plating cell includes a cavity therein having a larger volumetric portion adjacent a smaller volumetric portion adapted to hold one or more solutions therein. The plating cell also includes a base disposed adjacent the bottom of the plating cell and adapted to receive and mix one or more test solutions as part of the plating solution analysis. In one configuration, the base includes electrical ports adapted to connect stimulation signals to a working electrode, counter electrode, and reference electrode disposed within the cell. The base also includes a thermal sensor in thermal contact with test solutions contained within the vessel.
申请公布号 US2004084327(A1) 申请公布日期 2004.05.06
申请号 US20020287901 申请日期 2002.11.04
申请人 APPLIED MATERIALS, INC. 发明人 BALISKY TODD ALAN;CAMERON DONALD A.;SUN ZHI-WEN
分类号 G01N27/48;(IPC1-7):G01N27/26 主分类号 G01N27/48
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