| 发明名称 |
Method of forming planar color filters in an image sensor |
| 摘要 |
A method of planarizing an image sensor substrate is disclosed. The method comprises depositing a first polymer layer over the image sensor substrate. The first polymer layer is patterned to form pillars. Then, a second polymer layer is deposited over the pillars. Optionally, the second polymer layer is etched back. |
| 申请公布号 |
EP1414076(A2) |
申请公布日期 |
2004.04.28 |
| 申请号 |
EP20030256717 |
申请日期 |
2003.10.23 |
| 申请人 |
OMNIVISION INTERNATIONAL HOLDING LTD |
发明人 |
YAMAMOTO, KATSUMI |
| 分类号 |
G02B5/23;G03F7/00;H01L21/00;H01L27/146;H01L31/0216;H01L31/0232;(IPC1-7):H01L27/146;H01L31/021;H01L31/023 |
主分类号 |
G02B5/23 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
