| 摘要 |
PROBLEM TO BE SOLVED: To prevent thermal fatigue by guaranteeing stability to variation in controlled temperature. SOLUTION: This temperature control device comprises a gain switch circuit 6 which outputs gains 12, 13; a PI control circuit 10; and an output restraining circuit 2. The PI control circuit 10 is constructed of an integrator 17 which outputs either an integrated value of a first multiplied value 21 of the gain 12 and a temperature deviationΔT or a fixed value 23, and a tracking circuit 1. When actuated the tracking circuit 1 outputs a first control signal 28 based on a second multiplied value 22 of the second gain 13 and the temperature deviationΔT and the fixed value 23. When shifting to stability, the tracking circuit outputs a second control signal 29 based on the integrated value 24 and the second multiplied value 22. Proportional integration control is effected not when the tracking circuit is actuated but when it shifts to stability. When it shifts to stability, electric power is restrained by a small amount; when it is actuated, electric power is restrained by a large amount so as to avoid the repetition of sudden temperature changes and enable a smooth and quick shift to a stable temperature. COPYRIGHT: (C)2004,JPO
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