发明名称 |
Band aus einkritallinem Silizium für Mikrospiegel und MEMS auf SOI Material |
摘要 |
Provided is a micro-electromechanical assembly including an out-of-plane device formed on a device layer of a single crystal silicon substrate. A ribbon structure is formed on the device layer, where the ribbon structure has at least one of a width or depth, which is less than the width or depth of the out-of-plane device. A connection interface provides a connection point between a first end of the out-of-plane device and a first end of a ribbon structure, wherein the ribbon structure and out-of-plane device are integrated as a single piece. <IMAGE> |
申请公布号 |
DE60101134(T2) |
申请公布日期 |
2004.04.15 |
申请号 |
DE2001601134T |
申请日期 |
2001.11.21 |
申请人 |
XEROX CORP., ROCHESTER |
发明人 |
ROSA, MICHAEL A.;SUN, DECAI |
分类号 |
B81B3/00;B81B7/00;G02B6/12;G02B26/08;(IPC1-7):H01L21/762;H01L27/12 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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